A. Kotsopoulos, A. Pantazi, A. Sebastian, Th. Antonakopoulos:
High-speed spiral nanopositioning
The 18th World Congress of the International Federation of Automatic Control (IFAC), Milan, Italy, 2011.
Abstract: Nanometer-precise positioning at ultra-high velocities is a major challenge
for rapidly emerging applications that use scanning probes in order to observe and alter the properties of materials
down to the nanoscale. Typical examples include surface imaging, nanolithography and data storage. For example in
probe-based data storage, constant linear velocity along the scan trajectory is required, in order for storage
operations to be feasible. In this paper, a spiral-enhanced tracking control architecture is presented for the
constant linear velocity spiral case. The proposed controller exploits the spire-wise narrowband frequency content
of the reference signal, enabling very high speed and accurate positioning. The tracking performance and high-frequency
operation are corroborated with experimental results from a piezo-actuated nanopositioner with magneto-resistance-based
position sensors.
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